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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7276711
Issue Dt:
10/02/2007
Application #:
11150273
Filing Dt:
06/13/2005
Publication #:
20060113491
Pub Dt:
06/01/2006
Inventors:
Hiroshi Kawaguchi, Takanori Yagita, Takashi Nishi, Junichi Murakami et al
Title:
BEAM SPACE-CHARGE COMPENSATION DEVICE AND ION IMPLANTATION SYSTEM HAVING THE SAME
Assignment: 1
Reel/Frame:
016687/0111Recorded: 06/13/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KAWAGUCHI, HIROSHI
Exec Dt:
06/09/2005
YAGITA, TAKANORI
Exec Dt:
06/09/2005
NISHI, TAKASHI
Exec Dt:
06/09/2005
MURAKAMI, JUNICHI
Exec Dt:
06/09/2005
TSUKIHARA, MITSUKUNI
Exec Dt:
06/09/2005
KABASAWA, MITSUAKI
Exec Dt:
06/09/2005
Assignee:
SUMITOMO EATON NOVA CORPORATION
10-1, YOUGA 4-CHOME, SETAGAYA-KU
TOKYO, JAPAN
Correspondent:
ARENT FOX PLLC
1050 CONNECTICUT AVENUE, N.W., SUITE 400
WASHINGTON, D.C. 20036-5339
Assignment: 2
Reel/Frame:
019545/0771Recorded: 07/12/2007Pages: 10
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
SUMITOMO EATON NOVA CORPORATION
Exec Dt:
04/03/2006
Assignee:
SEN CORPORATION, AN SHI AND AXCELIS COMPANY
10-1, YOGA 4-CHOME
SETAGAYA-KU, TOKYO, JAPAN
Correspondent:
ARENT FOX LLP
1050 CONNECTICUT AVENUE, N.W.
SUITE 400
WASHINGTON, DC 20036-5339

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