Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11348595
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Filing Dt:
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02/07/2006
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Publication #:
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Pub Dt:
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06/15/2006
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Inventors:
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Sanjay D. Yadav, Quanyuan Shang, Wendell T. Blonigan
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Title:
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Method and apparatus for silicon oxide deposition on large area substrates
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| PATENT COUNSEL |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATTERSON & SHERIDAN, LLP |
| APPLIED MATERIALS, INC. |
| 3040 POST OAK BOULEVARD, SUITE 100 |
| HOUSTON, TX 77056 |
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