Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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11355418
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Filing Dt:
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02/15/2006
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Publication #:
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Pub Dt:
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07/13/2006
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Inventors:
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Hiroji Hanawa, Nils Johansson, Boguslaw Swedek, Manoocher Birang
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Title:
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MONITORING A METAL LAYER DURING CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| FISH & RICHARDSON P.C. |
| PO BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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