Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11321491
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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07/20/2006
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Inventors:
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Seok-jun Won, Yong-min Yoo, Weon-hong Kim, Dae-youn Kim, Young-hoon Kim, Dae-jin Kwon
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Title:
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Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG |
| YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| 1694-5 SINILDONG YUSEONG-GU |
| DAEJEON METROPOLITAN CITY, KOREA, REPUBLIC OF |
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| STEVEN M. MILLS |
| MILLS & ONELLO LLP |
| ELEVEN BEACON STREET |
| SUITE 605 |
| BOSTON, MA 02108 |
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