Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11285771
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Filing Dt:
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11/21/2005
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Publication #:
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Pub Dt:
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07/20/2006
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Inventors:
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Junichi Iwasawa, Hironori Hatono, Naoya Terada, Yuji Aso, Masakatsu Kiyohara
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Title:
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Member having plasma-resistance for semiconductor manufacturing apparatus and method for producing the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, NAKASHIMA 2-CHOME, KOKURAKITA-KU |
| KITAKYUSHU-SHI, FUKUOKA |
| FUKUOKA, JAPAN 802-8601 |
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| CARRIER BLACKMAN ASSOC PC |
| 24101 NOVI ROAD SUITE 100 |
| NOVI, MICHIGAN 48375 |
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