Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11072305
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Filing Dt:
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03/07/2005
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Publication #:
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Pub Dt:
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08/03/2006
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Inventors:
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Go Miya, Junichi Tanaka, Seiichiro Kanno, Motohiko Yoshigai, Akitaka Makino
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Title:
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Plasma etching apparatus and plasma etching method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI SHIMBASHI |
| MINATO-KU, TOKYO 105-8717, JAPAN |
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| 6-6, MARUNOUCHI 1-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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