Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11334941
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Filing Dt:
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01/19/2006
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Publication #:
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Pub Dt:
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08/17/2006
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Inventors:
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Mario Hennig, Wolfram Koestler, Molela Moukara, Karsten Zeiler, Thorsten Winkler et al
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Title:
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Imaging system and method for producing semiconductor structures on a wafer by imaging a mask on the wafer with a dipole diaphragm
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STRASSE 53 |
| MUENCHEN, GERMANY 81669 |
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| SLATER & MATSIL, L.L.P. |
| 17950 PRESTON RD. |
| SUITE 1000 |
| DALLAS, TX 75252 |
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