Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11362380
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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08/31/2006
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Inventors:
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Koji Sogabe, Yasunori Danjo
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Title:
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Electrostatic chuck and vacuum processing apparatus provided with the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO |
| CHIGASAKI-SHI |
| KANAGAWA, JAPAN |
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| FLOYD B. CAROTHERS |
| CAROTHERS AND CAROTHERS |
| 445 FORT PITT BLVD., SUITE 500 |
| PITTSBURGH, PA 15219 |
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