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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11101305
Filing Dt:
04/07/2005
Publication #:
20060228490
Pub Dt:
10/12/2006
Inventors:
Qunhua Wang, Li Hou, Sanjay D. Yadav, Gaku Furuta, Kenji Omori, Soo Young Choi et al
Title:
Gas distribution uniformity improvement by baffle plate with multi-size holes for large size PECVD systems
Assignment: 1
Reel/Frame:
016573/0694Recorded: 07/25/2005Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WANG, QUNHUA
Exec Dt:
05/24/2005
HOU, LI
Exec Dt:
04/05/2005
YADAV, SANJAY
Exec Dt:
05/25/2005
FURUTA, GAKU
Exec Dt:
04/11/2005
OMORI, KENJI
Exec Dt:
04/08/2005
CHOI, SOO YOUNG
Exec Dt:
05/24/2005
WHITE, JOHN M.
Exec Dt:
05/24/2005
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATENT COUNSEL
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CA 95052

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