Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2007
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Application #:
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10554430
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Filing Dt:
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10/24/2005
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Publication #:
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Pub Dt:
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11/09/2006
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Inventors:
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Akira Endo, Hideo Hoshino
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Title:
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DEBRIS COLLECTOR FOR EUV LIGHT GENERATOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ASASHI TOKAI BLDG. , 6-1 OHTEMACHI 2-CHOME |
| CHIYODA-KU, TOKYO, JAPAN 100-0004 |
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| GERALD T. SHEKLETON |
| WELSH & KATZ, LTD. |
| 120 SOUTH RIVERSIDE PLAZA |
| 22ND FLOOR |
| CHICAGO, IL 60010-3912 |
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