Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11398603
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Filing Dt:
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04/06/2006
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Publication #:
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Pub Dt:
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11/16/2006
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Inventors:
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Nobuyoshi Tanno, Takashi Horiuchi
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Title:
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SUBSTRATE TRANSPORT APPARATUS AND METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE FABRICATING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 20, AZA-SHIN OYOKE, MIYA, ZAO-CHO |
| KATTA-GUN, MIYAGI-KEN, JAPAN |
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| MARIO A. CONSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 20, AZA-SHIN' OYOKE, MIYA, ZAO-CHO |
| KATTA-GUN, MIYAGI-KEN, JAPAN |
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| MARIO A. CONSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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