Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11408875
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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11/16/2006
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Inventors:
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Lars Voelkel, Lothar Bauch, Mirko Vogt, Patrick Klingbeil, Joachim Herpe
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Title:
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Method for transferring structures from a photomask into a photoresist layer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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| STEVEN E. DICKE |
| 100 SOUTH 5TH STREET |
| SUITE 2250 |
| MINNEAPOLIS, MN 55402 |
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