Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11439538
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Filing Dt:
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05/24/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Inventors:
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Fumihiko Fukunaga, Kouichi Hayakawa, Masayoshi Takeda
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Title:
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Focus correction method for inspection of circuit patterns
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, D.C. 20005-3096 |
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