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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/25/2007
Application #:
11082404
Filing Dt:
03/17/2005
Publication #:
Pub Dt:
01/04/2007
Inventors:
Mitsuaki Amemiya, Akira Miyake
Title:
APPARATUS FOR EVALUATING EUV LIGHT SOURCE, AND EVALUATION METHOD USING THE SAME
Assignment: 1
Reel/Frame:
016703/0122Recorded: 06/20/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/01/2005
Exec Dt:
06/01/2005
Assignee:
3-30-2 SHIMOMARUKO
OHTA-KU, TOKYO, JAPAN
Correspondent:
MORGAN & FINNEGAN, LLP
3 WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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