Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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11329116
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Filing Dt:
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01/11/2006
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Publication #:
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Pub Dt:
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01/11/2007
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Inventors:
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Katsuhiko Murakami, Hideya Inoue
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Title:
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LASER PLASMA EUV LIGHT SOURCE, TARGET MATERIAL, TAPE MATERIAL, A METHOD OF PRODUCING TARGET MATERIAL, A METHOD OF PROVIDING TARGETS, AND AN EUV EXPOSURE DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| MR. MICHAEL R. KELLY |
| FINNEGAN, HENDERSON, FARABOW, |
| GARRETT & DUNNER, L.L.P. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001-4413 |
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