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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10023125
Filing Dt:
12/17/2001
Publication #:
20070009658
Pub Dt:
01/11/2007
Inventors:
Jong Hyun Yoo, Xinliang Lu, Chiliang Chen, Ken Kaung Lai, Chien-Teh Kao
Title:
Pulse nucleation enhanced nucleation technique for improved step coverage and better gap fill for WCVD process
Assignment: 1
Reel/Frame:
013082/0934Recorded: 09/12/2002Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YOO, JONG HYUN
Exec Dt:
08/20/2002
LU, XINLIANG
Exec Dt:
04/25/2002
CHEN, CHILIANG
Exec Dt:
04/23/2002
LAI, KEVIN KAUNG
Exec Dt:
04/22/2002
KAO, CHIEN-TEH
Exec Dt:
04/23/2002
Assignee:
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPARTMENT
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
LEGAL AFFAIRS DEPT.
PO BOX 450A
SANTA CLARA, CA 95052

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