Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11184703
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Filing Dt:
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07/18/2005
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Publication #:
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Pub Dt:
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01/18/2007
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Inventors:
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Hsiao Chih Chang, Tsun-Cheng Tang, Fei-Gwo Tsai, Tzu-Li Lee, Hung Chang Hsieh et al
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Title:
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Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN ROAD 6, SCIENCE BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN 300-77, R.O.C. |
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STEVEN E. KOFFS, ESQUIRE |
DUANE MORRIS LLP |
30 SOUTH 17TH STREET |
PHILADELPHIA, PA 19103-4196 |
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