Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2007
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Application #:
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11181433
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Filing Dt:
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07/14/2005
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Publication #:
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Pub Dt:
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01/18/2007
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Inventors:
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Hsien-Wei Chen, Hao-Yi Tsai, Hsueh-Chung Chen, Shin-Puu Jeng, Jian-Hong Lin, Chih-Tao Lin et al
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Title:
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METHOD AND APPARATUS FOR ENHANCED CMP PLANARIZATION USING SURROUNDED DUMMY DESIGN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 R.O.C. |
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| STEVEN E. KOFFS, ESQUIRE |
| DUANE MORRIS LLP |
| ONE LIBERTY PLACE |
| PHILADELPHIA, PA 19103 |
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