Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11492223
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Filing Dt:
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07/25/2006
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Publication #:
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Pub Dt:
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02/01/2007
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Inventors:
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Katsuhiro Itakura, Masuhiro Natsuhara, Tomoyuki Awazu, Hirohiko Nakata, Kenji Shinma
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Title:
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Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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5-33, KITAHAMA 4-CHOME |
CHUO-KU, OSAKA-SHI |
OSAKA, 541-0041, JAPAN |
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MCDERMOTT WILL & EMERY LLP |
600 13TH STREET, N.W. |
WASHINGTON, D.C. 20005-3096 |
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