Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11192997
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Filing Dt:
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07/29/2005
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Publication #:
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Pub Dt:
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02/08/2007
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Inventors:
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Ajay Kumar, Virinder Grewal, Wai-Fan Yau
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Title:
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Chemical vapor deposition chamber with dual frequency bias and method for manufacturing a photomask using the same
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| KEITH TABOADA, ESQ. |
| 595 SHREWSBURY AVENUE |
| SHREWSBURY, NJ 07702 |
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