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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8132130
Issue Dt:
03/06/2012
Application #:
11472544
Filing Dt:
06/22/2006
Publication #:
20070031740
Pub Dt:
02/08/2007
Inventors:
Jang Fung Chen, Duan-Fu Stephen Hsu, Douglas Van Den Broeke, Thomas Laidig
Title:
METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING MASK FEATURE PITCH DECOMPOSITION FOR USE IN A MULTIPLE EXPOSURE PROCESS
Assignment: 1
Reel/Frame:
018438/0696Recorded: 10/19/2006Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEN, JUNG FUNG
Exec Dt:
10/05/2006
HSU, DUAN-FU STEPHEN
Exec Dt:
10/05/2006
VAN DEN BROEKE, DOUGLAS
Exec Dt:
10/05/2006
LAIDIG, THOMAS
Exec Dt:
10/09/2006
Assignee:
ASML MASKTOOLS B.V.
P.O. BOX 324
5500 AH VELDHOVEN, NETHERLANDS
Correspondent:
MCDERMOTT WILL & EMERY LLP
600 13TH STREET, N.W.
WASHINGTON, D.C. 20005-3096
Assignment: 2
Reel/Frame:
032170/0425Recorded: 02/07/2014Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ASML MASKTOOLS B.V.
Exec Dt:
12/20/2013
Assignee:
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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