Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/29/2010
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Application #:
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11461994
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Filing Dt:
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08/02/2006
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Publication #:
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Pub Dt:
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02/08/2007
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Inventors:
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Jun Ye, Yu Cao, Luoqi Chen, Hua-Yu Liu
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Title:
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SYSTEM AND METHOD FOR CREATING A FOCUS-EXPOSURE MODEL OF A LITHOGRAPHY PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4211 BURTON DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| VERONICA WEINSTEIN |
| 3000 EL CAMINO REAL |
| 5 PALO ALTO SQUARE, 9TH FLOOR |
| PALO ALTO, CA 94306 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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