Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
07/28/2009
|
Application #:
|
11216801
|
Filing Dt:
|
08/31/2005
|
|
Publication #:
|
|
Pub Dt:
|
03/01/2007
| | | | |
|
Inventors:
|
Hienminh Huu Le, Akihiro Hosokawa
|
|
Title:
|
INTEGRATED METROLOGY TOOLS FOR MONITORING AND CONTROLLING LARGE AREA SUBSTRATE PROCESSING CHAMBERS
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| P.O. BOX BOX 450-A |
| PATNET COUNSEL |
| SANTA CLARA, CALIFORNIA 95052 |
|
|
|
|
| APPLIED MATERIALS INC. |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
|
|
Search Results as of:
05/10/2024 11:55 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
