Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/19/2010
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Application #:
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11053725
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Filing Dt:
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02/07/2005
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Publication #:
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Pub Dt:
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03/08/2007
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Inventors:
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Andrew R. Neureuther, Gregory R. McIntyre
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Title:
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PHASE SHIFTING TEST MASK PATTERNS FOR CHARACTERIZING ILLUMINATION AND MASK QUALITY IN IMAGE FORMING OPTICAL SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1111 FRANKLIN STREET, 12TH FLOOR |
| OAKLAND, CALIFORNIA 94607-5200 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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