Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10566241
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Filing Dt:
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10/04/2006
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Publication #:
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Pub Dt:
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03/08/2007
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Takahiro Horiguchi, Masayuki Kitamura, Akihiko Hiroe
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Title:
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Microwave plasma processing method, microwave plasma processing apparatus, and its plasma head
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3RD FLOOR, HAKUA BLDG. |
| 2-4-1, AKASAKA, MINATO-KU |
| TOKYO 107-0052, JAPAN |
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| 1-17-301, KOMEGAFUKURO 2-CHOME |
| AOBA-KU, SENDAI-SHI |
| MIYAGI, 980-0813, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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