Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/16/2008
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Application #:
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11221303
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Filing Dt:
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09/07/2005
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Publication #:
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Pub Dt:
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03/08/2007
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Inventors:
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Xiaolin Chen, Srinivas D. Nemani, DongQing Li, Jeffrey C. Munro, Marlon E. Menezes
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Title:
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POST DEPOSITION PLASMA TREATMENT TO INCREASE TENSILE STRESS OF HDP-CVD SIO2
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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