Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11561238
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Filing Dt:
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11/17/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Inventors:
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Louis Markoya, Aleksandr Khmelichek, Harry Sewell
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Title:
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ADJUSTABLE RESOLUTION INTERFEROMETRIC LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN NL-5504 DR, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN |
| & FOX P.L.L.C. |
| C/O MICHELLE K. HOLOUBEK |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINTON, D.C. 20005-3934 |
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