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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7886685
Issue Dt:
02/15/2011
Application #:
10578100
Filing Dt:
05/03/2006
Publication #:
20070070575
Pub Dt:
03/29/2007
Inventors:
Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa et al
Title:
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
017879/0564Recorded: 05/03/2006Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SEKIMOTO, MASAHIKO
Exec Dt:
04/14/2006
KATSUOKA, SEIJI
Exec Dt:
04/14/2006
DAI, NAOKI
Exec Dt:
04/14/2006
WATANABE, TERUYUKI
Exec Dt:
04/14/2006
OGAWA, TAKAHIRO
Exec Dt:
04/14/2006
SUZUKI, KENICHI
Exec Dt:
04/14/2006
KOBAYASHI, KENICHI
Exec Dt:
04/14/2006
MOTOSHIMA, YASUYUKI
Exec Dt:
04/14/2006
KATO, RYO
Exec Dt:
04/14/2006
Assignee:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO 144-8510, JAPAN
Correspondent:
WENDEROTH, LIND & PONACK, L.L.P.
ATTN: W. DOUGLAS HAHM, ESQ.
2033 K STREET, N.W., SUITE 800
WASHINGTON, DC 20006-1021

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