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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8316866
Issue Dt:
11/27/2012
Application #:
11612352
Filing Dt:
12/18/2006
Publication #:
20070084483
Pub Dt:
04/19/2007
Inventors:
Erik M Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik et al
Title:
METHOD AND APPARATUS FOR CLEANING A SEMICONDUCTOR SUBSTRATE
Assignment: 1
Reel/Frame:
018738/0135Recorded: 01/10/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
FREER, ERIK M
Exec Dt:
12/15/2006
DELARIOS, JOHN M
Exec Dt:
12/15/2006
MIKHAYLICHENKO, KATRINA
Exec Dt:
12/15/2006
RAVKIN, MICHAEL
Exec Dt:
12/15/2006
KOROLIK, MIKHAIL
Exec Dt:
12/15/2006
REDEKER, FRED C
Exec Dt:
12/15/2006
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MICHAEL L. GENCARELLA
710 LAKEWAY DRIVE
SUITE 200
SUNNYVALE, CA 94085

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