Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11241406
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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04/19/2007
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Inventors:
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Shengwu Chang, Isao Tsunoda, Nobihiro Tokoro, Dennis Rodier, Joseph C. Olson et al
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Title:
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METHOD, SYSTEM, AND APPARATUS FOR IMPROVING DOPING UNIFORMITY IN HIGH-TILT ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| SCOTT RICHARD FABER, ESQ. |
| 35 DORY ROAD |
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| GLOUCESTER, MA 01930 |
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