Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11608522
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Filing Dt:
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12/08/2006
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Publication #:
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Pub Dt:
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04/19/2007
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Inventors:
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Vikram SINGH, Harold M. Persing, Edmund J. Winder, Anthony Renau et al
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Title:
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TECHNIQUE FOR ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 02145 |
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| SCOTT RICHARD FABER, ESQ. |
| 35 DORY ROAD |
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| GLOUCESTER, MA 02145 |
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