Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/03/2012
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Application #:
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11583040
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Filing Dt:
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10/19/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Inventors:
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Yutaka Inouchi, Syojiro Dohi, Yasunori Ando, Yasuhiro Matsuda
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Title:
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METHOD OF OPERATING ION SOURCE AND ION IMPLANTING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 575, KUZE TONOSHIRO-CHO, MINAMI-KU, KYOTO-SHI |
| KYOTO, JAPAN 601-8205 |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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