Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/28/2010
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Application #:
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11580934
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Filing Dt:
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10/16/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Inventors:
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Morio Hosoya, Takeyuki Yamada, Akira Ikeda
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Title:
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MULTILAYER REFLECTIVE FILM COATED SUBSTRATE, MANUFACTURING METHOD THEREOF, REFLECTIVE MASK BLANK, AND REFLECTIVE MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-5, NAKA-OCHIAI 2-CHOME, SHINJUKU-KU |
| TOKYO, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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