Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11496978
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Filing Dt:
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08/01/2006
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Publication #:
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Pub Dt:
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05/03/2007
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Inventors:
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Byoung-Hoon Moon, Yong-Wook Kim, Tae-Ho Kim, Seung-Kook Ahn, Ji-Young Choi, Sung-Jae Lee
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Title:
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Apparatus for manufacturing semiconductor device with pump unit and method for cleaning the pump unit
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, YEONGTONG-GU, GYEONGGI-DO |
| SUWON-SI, KOREA, REPUBLIC OF |
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| FRANK CHAU |
| 130 WOODBURY ROAD |
| F. CHAU & ASSOCIATES, LLC |
| WOODBURY, NY 11797 |
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