Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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11588393
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Filing Dt:
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10/27/2006
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Publication #:
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Pub Dt:
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05/03/2007
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Inventors:
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Hiroshi Tomita, Hiroaki Yamada, Kunihiro Miyazaki, Hajime Onoda
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Title:
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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO 105-8001, JAPAN |
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| MR. ERNEST F. CHAPMAN |
| FINNEGAN, HDNERSON, FARABOW, ET AL |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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