Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/2008
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Application #:
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11583114
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Filing Dt:
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10/19/2006
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Publication #:
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Pub Dt:
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05/24/2007
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Inventors:
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Tetsuro Nakasugi, Ryoichi Inanami, Takumi Ota, Takeshi Koshiba
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD OF CHARACTER PROJECTION SYSTEM, CHARGED PARTICLE BEAM EXPOSURE DEVICE OF CHARACTER PROJECTION SYSTEM, PROGRAM FOR USE IN CHARGED PARTICLE BEAM EXPOSURE DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO 105-8001, JAPAN |
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| MR. ERNEST F. CAPMAN |
| FINNEGAN, HENDERSON, FARABOW, ET AL |
| 901 NEW YORK AVENUE, N.W. |
| WASHINGTON, D.C. 20001-4413 |
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