Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11281376
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Filing Dt:
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11/18/2005
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Publication #:
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Pub Dt:
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05/24/2007
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Inventors:
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Kaoru Yamamoto, Tadahiro Ishizaka, Atsushi Gomi, Yicheng Li, Masamichi Hara et al
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Title:
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Apparatus for thermal and plasma enhanced vapor deposition and method of operating
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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