Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/02/2009
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Application #:
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11564604
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Filing Dt:
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11/29/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Inventors:
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Chishio Koshimizu, Tomohiro Suzuki
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Title:
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METHOD FOR MEASURING PHYSICAL QUANTITY OF MEASUREMENT OBJECT IN SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM STORING PROGRAM FOR IMPLEMENTING THE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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