Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11304847
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Filing Dt:
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12/13/2005
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Publication #:
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Pub Dt:
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06/14/2007
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Inventors:
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Sang H. Ahn, Alexandros T. Demos, Hichem M'Saad
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Title:
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Method to improve the ashing/wet etch damage resistance and integration stability of low dielectric constant films
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P. O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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