Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10578184
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Filing Dt:
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05/04/2006
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Publication #:
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Pub Dt:
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06/21/2007
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Inventors:
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Tadahiro Ohmi, Toshihisa Nozawa, Osamu Morita, Tamaki Yuasa, Koji Kotani
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Title:
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Plasma processing apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-17-301, KOMEGAFUKURO 2-CHOME,, AOBA-KU, SENDAI-SHI |
| MIYAGI, JAPAN 980-0813 |
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| 3-6, AKASAK 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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