Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11317961
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Filing Dt:
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12/23/2005
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Publication #:
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Pub Dt:
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06/28/2007
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Inventors:
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Ing-Yann Albert Wang, Mohammad Kamarehi
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Title:
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HIGHLY EFFICIENT GAS DISTRIBUTION ARRANGEMENT FOR PLASMA TUBE OF A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| IPSG, P.C. |
| P.O. BOX 700640 |
| SAN JOSE, CA 95170-0640 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JOSEPH NGUYEN |
| PO BOX 700640 |
| SAN JOSE, CA 95170 |
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