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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/10/2010
Application #:
11618137
Filing Dt:
12/29/2006
Publication #:
Pub Dt:
07/05/2007
Inventors:
Koichi Sentoku, Hideki Ina, Koji Mikami, Yoshiaki Sugimura, Tomoyuki Miyashita et al
Title:
METHOD AND PROGRAM FOR CALCULATING EXPOSURE DOSE AND FOCUS POSITION IN EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
019020/0356Recorded: 03/15/2007Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/15/2007
Exec Dt:
01/15/2007
Exec Dt:
01/17/2007
Exec Dt:
01/16/2007
Exec Dt:
01/16/2007
Exec Dt:
01/15/2007
Assignee:
3-30-2 SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN 146-8501
Correspondent:
MORGAN & FINNEGAN LLP
3 WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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