Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10587427
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Filing Dt:
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07/26/2006
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Publication #:
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Pub Dt:
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07/12/2007
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Inventors:
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Eri Tsukada, Christian Dussarrat, Jean-Marc Girard
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Title:
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Method for producing silicon nitride films and silicon oxynitride films by chemical vapor deposition
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 75321 QUAI D'ORSAY CEDEX 07, FRANCE |
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| LINDA K. RUSSELL |
| 2700 POST OAK BLVD., STE. 1800 |
| HOUSTON, TX 77056 |
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