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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	7803230	Issue Dt:	09/28/2010	Application #:	10593560	Filing Dt:	09/20/2006
Publication #:	20070175501	Pub Dt:	08/02/2007
Inventors:	Masaru Amai, Kenji Sekiguchi, Takehiko Orii, Hiroki Ohno, Satoru Tanaka, Takuya Mori
Title:	SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND MEDIUM FOR RECORDING PROGRAM USED FOR THE METHOD

Assignment: 1

Reel/Frame:

Recorded: 09/20/2006

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

07/18/2006

SEKIGUCHI, KENJI

Exec Dt:

07/07/2006

Exec Dt:

07/11/2006

Exec Dt:

07/11/2006

Exec Dt:

07/19/2006

Exec Dt:

07/19/2006

Assignee:

TOKYO ELECTRON LIMITED

3-6, AKASAKA 5-CHOME

MINATO-KU, TOKYO-TO, JAPAN

Correspondent:

SMITH, GAMBRELL & RUSSELL

1850 M STREET, N.W.

SUITE 800

WASHINGOTN, D.C. 20036

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