Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/16/2010
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Application #:
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11608738
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Filing Dt:
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12/08/2006
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Publication #:
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Pub Dt:
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08/02/2007
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Inventors:
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Guang-Yaw Hwang, Pu-Lun Lui, Yu-Wei Yang
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Title:
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METHODS AND APPARATUS FOR IN-SITU SUBSTRATE PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JOSEPH A. NGUYEN |
| P.O. BOX 700640 |
| SAN JOSE, CA 95170 |
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