Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11538860
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Filing Dt:
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10/05/2006
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Publication #:
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Pub Dt:
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08/02/2007
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Inventors:
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Matthias Schaller, Uwe Schulze, Mathias Baranyai
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Title:
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METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY GAS FLOW CONTROL ON THE BASIS OF CD MEASUREMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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| J. MIKE AMERSON |
| 10333 RICHMOND, SUITE 1100 |
| HOUSTON, TX 77042 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121 W. LONG LAKE ROAD |
| SUITE 300 |
| BLOOMFIELD HILLS, MICHIGAN 48304 |
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| SEAN ANDERSON |
| 1526 GILPIN AVENUE |
| WILMINGTON, DE 19806 |
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