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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/26/2010
Application #:
11698049
Filing Dt:
01/26/2007
Publication #:
Pub Dt:
08/16/2007
Inventors:
Makoto Hayakawa, Hiroshi Tomita
Title:
DEFECT INSPECTION METHOD, DEFECT INSPECTION APPARATUS HAVING A MOUNTING TABLE WITH A SUBSTRATE THEREON AND AN IMAGE PICKUP DEVICE ARE RELATIVELY MOVED FOR CAPTURING THE IMAGE OF THE SUBSTRATE, AND COMPUTER READABLE STORAGE MEDIUM STORING A PROGRAM FOR PERFORMING TH
Assignment: 1
Reel/Frame:
018843/0091Recorded: 01/26/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/07/2006
Exec Dt:
12/07/2006
Assignee:
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO 107-8481, JAPAN
Correspondent:
SMITH, GAMBRELL & RUSSELL
1850 M STREET, N.W., SUITE 800
WASHINGTON, DC 20036

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