Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11276137
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Filing Dt:
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02/15/2006
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Publication #:
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Pub Dt:
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08/16/2007
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Inventors:
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Manoj Balachandran, James A. Hagan, Wei-Tsu Tseng, Adam D. Ticknor, Ben Kim et al
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Title:
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WAFER REMOVING FORCE REDUCTION ON CMP TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| HOFFMAN, WARNICK & D'ALESSANDRO LLC |
| 75 STATE STREET, 14TH FLOOR |
| ALBANY, NY 12207 |
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