Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/24/2009
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Application #:
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10594252
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Filing Dt:
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09/26/2006
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Publication #:
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Pub Dt:
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08/16/2007
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Inventors:
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Norifumi Fujimura, Ryoma Hayakawa, Hiroya Kitahata, Tsuyoshi Uehara, Takuya Yara
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Title:
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METHOD AND APPARATUS FOR FORMING OXYNITRIDE FILM AND NITRIDE FILM, OXYNITRIDE FILM, NITRIDE FILM, AND SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-4, NISHITENMA 2-CHOME, KITA-KU, OSAKA-SHI |
| OSAKA 530-8565, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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