Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2009
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Application #:
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10566495
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Filing Dt:
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07/06/2006
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Publication #:
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Pub Dt:
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08/23/2007
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Inventors:
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Hiroshi Kannan, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura et al
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Title:
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A GAS SUPPLY FACILITY OF A CHAMBER AND A METHOD FOR AN INTERNAL PRESSURE CONTROL OF THE CHAMBER FOR WHICH THE FACILITY IS EMPLOYED
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-2, ITACHIBORI 2-CHOME, NISHI-KU |
OSAKA-SHI, OSAKA, JAPAN 550-0012 |
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 1070052 |
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JOERG-UWE SZIPL |
2300 NINTH ST., SOUTH |
SUITE PH-1 |
ARLINGTON, VA 22204 |
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