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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/29/2009
Application #:
10566495
Filing Dt:
07/06/2006
Publication #:
Pub Dt:
08/23/2007
Inventors:
Hiroshi Kannan, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura et al
Title:
A GAS SUPPLY FACILITY OF A CHAMBER AND A METHOD FOR AN INTERNAL PRESSURE CONTROL OF THE CHAMBER FOR WHICH THE FACILITY IS EMPLOYED
Assignment: 1
Reel/Frame:
018404/0616Recorded: 10/18/2006Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Exec Dt:
10/10/2006
Assignees:
3-2, ITACHIBORI 2-CHOME, NISHI-KU
OSAKA-SHI, OSAKA, JAPAN 550-0012
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 1070052
Correspondent:
JOERG-UWE SZIPL
2300 NINTH ST., SOUTH
SUITE PH-1
ARLINGTON, VA 22204

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